Batch cassette transfer (Manual CTC)
Foup transfer (Auto CTC)
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Batch cassette transfer (Auto CTC)

Description : Batch cassette transfer (Auto CTC)

Model :
150mm cassette transfer (Auto CTC 150)
200mm cassette transfer (Auto CTC 200)

Service scopes:

Inspection Repair Retrofit Exchange Overhaul Spare Parts


  • Wafer-to-wafer for wafer cassette
  • Use in the import and export of the cassette conversion

Application Range:

  • Semiconductor factory
  • IC packaging factory


  • Suitable for all kinds of 100/150/200mm cassette
  • ESD: 4~7
  • Emergency switch
  • Resistance adjustment to prevent deformation of the wafer
  • Long material life
  • Easy maintenance of parts
  • External structure design defensive sensor
  • when Cassette is placed incorrectly , startup button has no effect, Prevent happening occurring wafer braking or wafer falling out