ASYST 300mm Spartan Sorter EFEM 3 IO
ASYST 300mm Spartan Sorter EFEM Compact with 3 I/O
cassette transfer (Auto CTC150)
Batch cassette transfer (Auto CTC)
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Batch cassette transfer (Manual CTC)

Description : Batch cassette transfer (Manual CTC)

Model :
CTC 105/100 mm (Manual 105/100 mm)
CTC 200 mm (Manual 200 mm)

Service scopes:

Inspection Repair Retrofit Exchange Overhaul Spare Parts


  • Wafer-to-wafer for wafer boat
  • Use in the import and export of the boat conversion

Application Range:

  • Semiconductor factory
  • IC packaging factory


  • Suitable for all kinds of 100/150/200mm boat
  • ESD: 4~7
  • Long material life
  • Easy maintenance of parts
  • External structure design defensive senser
  • when Cassette is placed incorrectly , startup button has no effect , Prevent happening occurring wafer brecking or wafer falling out