Brooks FixLoad 6M
2018-01-24ASYST SMIF Mini Environment & LPT2200 ASSY
2018-01-24Brooks FixLoad 25
Description : Brooks Fixload 25
Model : Fixload 25
Service scopes :
Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
● | ● | ● | ● | ● | ● |
Category: Brooks FixLoad
Spare Parts :
Vacuum Sensor(PN239467) | Carrier Prensent Sensor (PN 418999) |
Keylatch IV board ET866 REV13 |
Fixload25 FESTOV2,3,4 Vacuum valve |
Fixload25 FESTO V5 vacuum valve |
Fixload25 FESTO V6 Vacuum Valve |
LP V6 vacuum valve | Brooks Pad Kit |
Fix25 013501-099-17L | Fix25 013501-083-17L |