Brooks UL408 Wafer Sorter
2018-02-26
ASYST load port S3
2018-02-26
ASYST load port S2
產品名稱 :亞士帝晶圓傳送機/ ASYST Load Port S2
產品型號 : Load Port S2
服務範圍 :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
備品料件 :
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| Laser ARM Motor |
FL Bin |
MOT, Vertical Motor |
MOT,Shuttle Motor |
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| MOT, Active Latch Motor | Vertical Belt | Shuttle Belt | Active Latch Belt |
 |
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| Load/Unload button |
Banner Kit |
IR Banner |
FL INX PCB |
 |
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 |
|
| Active Latch Assy | Shuttle Lead Assy | E84 P10 Cable |
