ASYST load port S2
2018-02-26
TDK load port E3
2018-02-26
ASYST load port S3
產品名稱 : 亞士帝晶圓傳送機/ ASYST Load Port S3
產品型號 : Load Port S3
服務範圍 :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
備品料件 :
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 |
 |
 |
| Laser ARM Motor |
FL Bin |
MOT, Vertical Motor |
MOT,Shuttle Motor |
 |
 |
 |
 |
| MOT, Active Latch Motor | Vertical Belt | Shuttle Belt | Active Latch Belt |
 |
 |
 |
 |
| Load/Unload button |
Banner Kit |
IR Banner |
FL INX PCB |
 |
 |
 |
|
| Active Latch Assy | Shuttle Lead Assy | E84 P10 Cable |
