Brooks Fixload V6
2018-02-26
ASYST SMIF LPX2200 ASSY
2018-02-26
ASYST SMIF INX2200 ASSY
產品名稱 : 亞士帝晶圓傳送機 / ASYST SMIF INX2200
產品型號 : INX2200 ASSY
服務範圍 :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
備品料件 :
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| Encoder | MOT,INX2200 Motor | BEL,Belt,INX Long | BEL,Belt,INX Short |
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| KIT,Servo AMP | KIT,Banner MA3-4 | KIT,RFID reader ATR-9000 |
MOT,300mm FL Isoport port place motor |
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| MOT,300mm FL pod door motor |
MOT,300mm FL Shutter motor |
MOT,300FL S3 elevator motor |
MOT,Latch motor |
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| KIT,INX lead screw assy |
KIT,Banner MPC3 | BEA,Bearing | BEA,Bearing |
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| BEL,O-Ring | KIT,IR | PCB | MOT,Pod door motor |
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| Emitter sensor SEN,(Banner LR300) |
PCB,INX,INX PCB | PCB,Tag reader | PCB,Tag reader |
