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Brooks FixLoad 25

產品名稱 : 布魯克斯晶圓傳送機 / Brooks Fixload 25

產品型號 : Fixload 25

服務範圍 :

Inspection Repair Retrofit Exchange Overhaul Spare Parts
分類:

備品料件 :

Vacuum Sensor(PN239467) Carrier Prensent
Sensor (PN 418999)
Keylatch IV board
ET866 REV13
Fixload25 FESTOV2,3,4
Vacuum valve
Fixload25 FESTO V5
vacuum valve
Fixload25 FESTO V6
Vacuum Valve
LP V6 vacuum valve Brooks Pad Kit
Fix25 013501-099-17L Fix25 013501-083-17L