Brooks FixLoad 6M
2018-01-24
ASYST SMIF Mini Environment & LPT2200 ASSY
2018-01-24
Brooks FixLoad 25
產品名稱 : 布魯克斯晶圓傳送機 / Brooks Fixload 25
產品型號 : Fixload 25
服務範圍 :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
備品料件 :
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| Vacuum Sensor(PN239467) | Carrier Prensent Sensor (PN 418999) |
Keylatch IV board ET866 REV13 |
Fixload25 FESTOV2,3,4 Vacuum valve |
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| Fixload25 FESTO V5 vacuum valve |
Fixload25 FESTO V6 Vacuum Valve |
LP V6 vacuum valve | Brooks Pad Kit |
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| Fix25 013501-099-17L | Fix25 013501-083-17L |
