
TDK load port G1H1
2018-02-26
ASYST SMIF INX2200 ASSY
2018-02-26Brooks Fixload V6
產品名稱 : 布魯克斯晶圓傳送機/Brooks Fixload V6
產品型號 : Fixload V6
服務範圍 :
Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
● | ● | ● | ● | ● | ● |
分類: Brooks FixLoad
備品料件 :
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Vacuum Sensor (PN239467) |
Carrier Prensent Sensor (PN 418999) |
Keylatch IV board ET866 REV13 |
Fixload25 FESTOV2,3,4 Vacuum valve |
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Fixload25 FESTO V5 vacuum valve |
Fixload25 FESTO V6 Vacuum Valve |
LP V6 vacuum valve | Brooks Pad Kit |
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Fix25 013501-099-17L | Fix25 013501-083-17L |