TDK load port E3
2018-02-26TDK load port F1
2018-02-26TDK load port E4
產品名稱 : 晶圓傳送機 / TDK load port E4
產品型號 : TDK load port E4
服務範圍 :
Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
● | ● | ● | ● | ● | ● |
分類: TDK load port
備品料件 :
Docking Cylinder (205mm)-F1 |
Docking Cylinder (205mm)-F1 |
Vacuum 電磁閥(附Cable) -E2,E3,F1 |
Auto Switch (Dock:CLS02a)-F1 |
Photo Sensor (Placement 前:PH01)-F1 |
Amplifier for Switch-E3,E4 |
壓力Switch(+Air Switch) -E3,F1 |
CPU Board-E2 |
Main Board-E3 | Main Board-F1 | Beam Sensor (防手夾左:上受光ES04A)-E3 |
Auto Switch (Door Open CLS04a)-E3 |
Fiber Sensor-E2,E3,E4 | Flat Cable LED2-E4 | LED 燈號信息顯示面板-E3 | Fuse A1 |
Fuse A2 | 中繼基板-E3 | Linier Guide-E3 | 中繼基板-E3 |