TDK load port F1
2018-02-26
Brooks Fixload V6
2018-02-26
TDK load port G1H1
產品名稱 : 晶圓傳送機 / TDK Load Port G1H1
產品型號 : TDK load port G1H1
服務範圍 :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
備品料件 :
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| Docking Cylinder (205mm)-F1 |
Docking Cylinder (205mm)-F1 |
Vacuum 電磁閥 (附Cable)-E2,E3,F1 |
Auto Switch (Dock:CLS02a)-F1 |
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| Photo Sensor (Placement 前：PH01)-F1 |
Amplifier for Switch-E3,E4 |
壓力Switch(+Air Switch) -E3,F1 |
CPU Board-E2 |
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| Main Board-E3 | Main Board-F1 | Beam Sensor (防手夾左：上受光ES04A)-E3 |
Auto Switch (Door Open CLS04a)-E3 |
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| Fiber Sensor-E2,E3,E4 | Flat Cable LED2-E4 | LED 燈號信息顯示面板-E3 | Fuse A1 |
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| Fuse A2 | 中繼基板-E3 | Linier Guide-E3 | 中繼基板-E3 |
