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Brooks FixLoad 6M
Brooks FixLoad 6M
2018-01-24
Mini-Environment-&-LPT2200
ASYST SMIF Mini Environment & LPT2200 ASSY
2018-01-24
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Brooks FixLoad 25

Brooks FixLoad 25

Description : Brooks Fixload 25

Model : Fixload 25

Service scopes :

Inspection Repair Retrofit Exchange Overhaul Spare Parts
● ● ● ● ● ●
Category: Brooks FixLoad
  • Description

Spare Parts :

Vacuum Sensor(PN239467) Carrier Prensent
Sensor (PN 418999)		 Keylatch IV board
ET866 REV13		 Fixload25 FESTOV2,3,4
Vacuum valve
Fixload25 FESTO V5
vacuum valve		 Fixload25 FESTO V6
Vacuum Valve		 LP V6 vacuum valve Brooks Pad Kit
Fix25 013501-099-17L Fix25 013501-083-17L

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  • Batch Cassette Transfer

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弘景興業有限公司

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+886-3-5586181

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+886-6-5892902

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Shanghai Yun Wei Machinery Equipment Co.,LTD

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No.1234, Room 506,New Songjiang Rd., Song jiang District , Shanghai 201600

+86-021-37776775

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+86-177-2265-2058

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