ASYST load port S3
2018-02-26
TDK load port E4
2018-02-26
TDK load port E3
Description : TDK Load Port E3
Model : TDK load port E3
Service scopes :
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
Spare Parts :
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| Docking Cylinder (205mm)-F1 |
Docking Cylinder (205mm)-F1 |
Vacuum Valve-E2,E3,F1 | Auto Switch (Dock:CLS02a)-F1 |
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| Photo Sensor (Placement ：PH01)-F1 |
Amplifier for Switch-E3,E4 |
Switch(+ Air Switch -E3,F1 |
CPU Board-E2 |
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| Main Board-E3 | Main Board-F1 | Beam Sensor-E3 | Auto Switch (Door Open CLS04a)-E3 |
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| Fiber Sensor-E2,E3,E4 | Flat Cable LED2-E4 | LED PCB-E3 | Fuse A1 |
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| Fuse A2 | PCB-E3 | Linier Guide-E3 | PCB-E3 |
