ASYST 300mm Spartan Sorter EFEM Compact with 3 I/O
2018-09-15
Batch cassette transfer (Auto CTC)
2018-09-15
Batch cassette transfer (Manual CTC)
Description : Batch cassette transfer (Manual CTC)
Model :
CTC 105/100 mm (Manual 105/100 mm)
CTC 200 mm (Manual 200 mm)
Service scopes:
| Inspection | Repair | Retrofit | Exchange | Overhaul | Spare Parts |
| ● | ● | ● | ● | ● | ● |
Function:
- Wafer-to-wafer for wafer boat
- Use in the import and export of the boat conversion
Application Range:
- Semiconductor factory
- IC packaging factory
Characteristic:
- Suitable for all kinds of 100/150/200mm boat
- ESD: 4~7
- Long material life
- Easy maintenance of parts
- External structure design defensive senser
- when Cassette is placed incorrectly , startup button has no effect , Prevent happening occurring wafer brecking or wafer falling out
